eprintid: 34683 rev_number: 10 userid: 7558 dir: disk0/00/03/46/83 datestamp: 2019-09-29 05:00:02 lastmod: 2019-09-29 05:15:06 status_changed: 2019-09-29 05:00:02 type: thesis_degree succeeds: 34531 metadata_visibility: show contact_email: hyojeongkim0222@gmail.com item_issues_id: thesis_degree_versioning item_issues_type: thesis_degree_versioning item_issues_description: ETD 34683 is using versioning. item_issues_timestamp: 2018-06-28 06:02:17 item_issues_status: discovered item_issues_count: 1 eprint_status: archive creators_name: Kim, Hyo Jeong creators_email: Hyk31@pitt.edu creators_id: hyk31 title: NANOSCALE PATTERNING WITH DNA NANOSTRUCTURES ispublished: unpub divisions: sch_as_chemistry full_text_status: public keywords: nanofabrication, dna nanostructures, pattern transfer, nanoscale, lithography, abstract: Predictable and programmable Watson-Crick base pairing between DNA strands makes DNA not only a hereditary material, but also an ideal building block for designing nanometer-scale structures. Since Seeman opened the door to the era of DNA nanotechnology in 1982 by introducing the idea of utilizing DNA to build a mechanically robust four-arm junction structure to the scientific community, there has been an explosive growth in both structural DNA nanotechnology and DNA-based nanofabrication in the past few decades. This dissertation focuses on the nanoscale patterning of soft and hard materials with DNA nanostructures. Chapter two specifically presents an advanced nanoimprint lithography method to construct polymer stamps with negative tone patterns using one- to three-dimensional DNA nanostructures to transfer patterns with high fidelity. The resulting polymer stamps further serve as molds to transfer the patterns to positive imprints on other polymer films. Chapter three presents a method to increase the stability of DNA nanostructure templates through conformal coating with a nanometer-thin protective inorganic oxide layer created using atomic layer deposition. Chapter four presents a new method of direct high contrast pattern transfer from DNA nanostructures to a silicon substrate by reactive ion etching with the help of calcium chloride. This study is the first report on high contrast pattern transfer from unmodified DNA nanostructures to silicon. We hope this dissertation could encourage future work to reveal the true power of DNA-based nanofabrication. date: 2018-09-28 date_type: published pages: 175 institution: University of Pittsburgh refereed: TRUE etdcommittee_type: committee_chair etdcommittee_type: committee_member etdcommittee_type: committee_member etdcommittee_type: committee_member etdcommittee_name: Liu, haitao etdcommittee_name: hutchison, geoffrey etdcommittee_name: Li, Lei etdcommittee_name: meyer, tara etdcommittee_email: hliu@pitt.edu etdcommittee_email: geoffh@pitt.edu etdcommittee_email: lel55@pitt.edu etdcommittee_email: tmeyer@pitt.edu etdcommittee_id: hliu etdcommittee_id: geoffh etdcommittee_id: lel55 etdcommittee_id: tmeyer etd_defense_date: 2018-04-03 etd_approval_date: 2018-09-28 etd_submission_date: 2018-05-15 etd_release_date: 2018-09-28 etd_access_restriction: 1_year etd_patent_pending: TRUE thesis_type: dissertation degree: PhD citation: Kim, Hyo Jeong (2018) NANOSCALE PATTERNING WITH DNA NANOSTRUCTURES. Doctoral Dissertation, University of Pittsburgh. (Unpublished) document_url: http://d-scholarship-dev.library.pitt.edu/34683/1/ETD_Hyojeong%20Kim_phd_dissertation_FINAL.pdf