@unpublished{pittir34683,
           month = {September},
           title = {NANOSCALE PATTERNING WITH DNA NANOSTRUCTURES},
          author = {Hyo Jeong Kim},
            year = {2018},
        keywords = {nanofabrication, dna nanostructures, pattern transfer, nanoscale, lithography,},
             url = {http://d-scholarship-dev.library.pitt.edu/34683/},
        abstract = {Predictable and programmable Watson-Crick base pairing between DNA strands makes DNA not only a hereditary material, but also an ideal building block for designing nanometer-scale structures. Since Seeman opened the door to the era of DNA nanotechnology in 1982 by introducing the idea of utilizing DNA to build a mechanically robust four-arm junction structure to the scientific community, there has been an explosive growth in both structural DNA nanotechnology and DNA-based nanofabrication in the past few decades. 
	This dissertation focuses on the nanoscale patterning of soft and hard materials with DNA nanostructures. Chapter two specifically presents an advanced nanoimprint lithography method to construct polymer stamps with negative tone patterns using one- to three-dimensional DNA nanostructures to transfer patterns with high fidelity. The resulting polymer stamps further serve as molds to transfer the patterns to positive imprints on other polymer films. Chapter three presents a method to increase the stability of DNA nanostructure templates through conformal coating with a nanometer-thin protective inorganic oxide layer created using atomic layer deposition. Chapter four presents a new method of direct high contrast pattern transfer from DNA nanostructures to a silicon substrate by reactive ion etching with the help of calcium chloride. This study is the first report on high contrast pattern transfer from unmodified DNA nanostructures to silicon. We hope this dissertation could encourage future work to reveal the true power of DNA-based nanofabrication.}
}